|
MICRONIC MP80+ LARGE-AREA MASK WRITER
•32" x
32" Plate Size
•3 micron minimum feature size
•H & E-Line capabilities
•Accepts GDSII, DXF, Gerber,
MANN, MEBES,
E-Mask, DWG, Postscript |
|
 |
MICRONIC LRS-600 LARGE-AREA MASK
WRITER
| •24"
x 24" Plate Size |
•H &
E-Line capabilities |
| •6 micron
minimum feature size |
•Accepts
GDSII, DXF, Gerber, MANN, MEBES, E-Mask,
DWG, Postscript |
2 LARGE-AREA IMAGE REPEATING
SYSTEMS
| •4"x
4" to 24"x 24"Plate Size
|
•1X Projection
System |
| •4.5"x
4.5" Maximum Die Size |
•10 um
Minimum Feature Size |
•18"x 18"
Stepping Area |
•H-Line Capability
|
LUMINA LARGE-AREA PRECISION MEASURING
SYSTEM
| •Accepts
substrates up to 20" x 24" |
0.1 micron
standard resolultion |
| •Fully
Automatic Measuring |
•Video
Coordinate System With •Image Data
Output |
|
